Elaboration and quantitative investigation of BCN-type films by dynamic SIMS using the MCsx+ mode

F. Wu, N. Valle, R. Fitzpatrick, J.G. Ekerdt, L. Houssiau, H.-N. Migeon

Résultats de recherche: Contribution à un journal/une revueArticleRevue par des pairs

Résumé

A quantitative SIMS approach using MCs mode has been tested on boron carbonitride type films (BCN). Thick amorphous BC N films of different stoichiometries (0.46 ≤ x ≤ 0.68; 0.07 ≤ y ≤ 0.43; 0.01 ≤ z ≤ 0.26), deposited by thermal chemical vapour deposition, were used as standard samples to establish calibration curves between secondary ion intensities derived from in-depth secondary ion mass spectroscopy analyses and compositions determined by X-ray photoelectron spectroscopy. The matrix intensity ratios I(CCs )/I(BCs) and I(CCs)/I(BCs ) appear linear with the concentration ratios C :C; ratios of I(NCs)/I(BCs) and I(NCs)/I(BCs) appear linear with the concentration ratio C:C as well. These calibration curves allow the quantification of matrix species in BCN films, in the range of studied stoichiometries and can be employed for compositional determination of unknown BCN films.
langue originaleAnglais
Pages (de - à)669-672
Nombre de pages4
journalSurface and interface analysis
Volume43
Numéro de publication1-2
Les DOIs
Etat de la publicationPublié - 1 janv. 2011

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