Elaboration and quantitative investigation of BCN-type films by dynamic SIMS using the MCsx+ mode

F. Wu, N. Valle, R. Fitzpatrick, J.G. Ekerdt, L. Houssiau, H.-N. Migeon

Research output: Contribution to journalArticlepeer-review

Abstract

A quantitative SIMS approach using MCs mode has been tested on boron carbonitride type films (BCN). Thick amorphous BC N films of different stoichiometries (0.46 ≤ x ≤ 0.68; 0.07 ≤ y ≤ 0.43; 0.01 ≤ z ≤ 0.26), deposited by thermal chemical vapour deposition, were used as standard samples to establish calibration curves between secondary ion intensities derived from in-depth secondary ion mass spectroscopy analyses and compositions determined by X-ray photoelectron spectroscopy. The matrix intensity ratios I(CCs )/I(BCs) and I(CCs)/I(BCs ) appear linear with the concentration ratios C :C; ratios of I(NCs)/I(BCs) and I(NCs)/I(BCs) appear linear with the concentration ratio C:C as well. These calibration curves allow the quantification of matrix species in BCN films, in the range of studied stoichiometries and can be employed for compositional determination of unknown BCN films.
Original languageEnglish
Pages (from-to)669-672
Number of pages4
JournalSurface and interface analysis
Volume43
Issue number1-2
DOIs
Publication statusPublished - 1 Jan 2011

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