Abstract
A quantitative SIMS approach using MCs mode has been tested on boron carbonitride type films (BCN). Thick amorphous BC N films of different stoichiometries (0.46 ≤ x ≤ 0.68; 0.07 ≤ y ≤ 0.43; 0.01 ≤ z ≤ 0.26), deposited by thermal chemical vapour deposition, were used as standard samples to establish calibration curves between secondary ion intensities derived from in-depth secondary ion mass spectroscopy analyses and compositions determined by X-ray photoelectron spectroscopy. The matrix intensity ratios I(CCs )/I(BCs) and I(CCs)/I(BCs ) appear linear with the concentration ratios C :C; ratios of I(NCs)/I(BCs) and I(NCs)/I(BCs) appear linear with the concentration ratio C:C as well. These calibration curves allow the quantification of matrix species in BCN films, in the range of studied stoichiometries and can be employed for compositional determination of unknown BCN films.
Original language | English |
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Pages (from-to) | 669-672 |
Number of pages | 4 |
Journal | Surface and interface analysis |
Volume | 43 |
Issue number | 1-2 |
DOIs | |
Publication status | Published - 1 Jan 2011 |
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Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager), Tijani Tabarrant (Operator), Frederic COME (Operator) & Paul-Louis Debarsy (Manager)
Technological Platform Synthesis, Irradiation and Analysis of MaterialsFacility/equipment: Technological Platform