Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen

Marco Jacobs, Franz Bodart, Guy Terwagne, D. Schryvers, A. Poulet

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langue originale	Anglais
Pages (de - à)	231-237
Nombre de pages	7
journal	Nuclear instruments and methods in physics research B
Volume	147
Etat de la publication	Publié - 1999

Contient cette citation

@article{d09a5512e37e4b349eb12d3ff930a867,

title = "Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen",

author = "Marco Jacobs and Franz Bodart and Guy Terwagne and D. Schryvers and A. Poulet",

note = "Publication code : **RES. ACAD.",

year = "1999",

language = "English",

volume = "147",

pages = "231--237",

journal = "Nuclear instruments and methods in physics research B",

issn = "1872-9584",

publisher = "Elsevier",

}

TY - JOUR

T1 - Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen

AU - Jacobs, Marco

AU - Bodart, Franz

AU - Terwagne, Guy

AU - Schryvers, D.

AU - Poulet, A.

N1 - Publication code : **RES. ACAD.

PY - 1999

Y1 - 1999

M3 - Article

SN - 1872-9584

VL - 147

SP - 231

EP - 237

JO - Nuclear instruments and methods in physics research B

JF - Nuclear instruments and methods in physics research B

ER -