Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen

Marco Jacobs, Franz Bodart, Guy Terwagne, D. Schryvers, A. Poulet

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)231-237
Number of pages7
JournalNuclear instruments and methods in physics research B
Volume147
Publication statusPublished - 1999

Cite this

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title = "Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen",
author = "Marco Jacobs and Franz Bodart and Guy Terwagne and D. Schryvers and A. Poulet",
note = "Publication code : **RES. ACAD.",
year = "1999",
language = "English",
volume = "147",
pages = "231--237",
journal = "Nuclear Instruments and Methods in Physical Research B",
issn = "0168-583X",
publisher = "Elsevier",

}

Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen. / Jacobs, Marco; Bodart, Franz; Terwagne, Guy; Schryvers, D.; Poulet, A.

In: Nuclear instruments and methods in physics research B, Vol. 147, 1999, p. 231-237.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen

AU - Jacobs, Marco

AU - Bodart, Franz

AU - Terwagne, Guy

AU - Schryvers, D.

AU - Poulet, A.

N1 - Publication code : **RES. ACAD.

PY - 1999

Y1 - 1999

M3 - Article

VL - 147

SP - 231

EP - 237

JO - Nuclear Instruments and Methods in Physical Research B

JF - Nuclear Instruments and Methods in Physical Research B

SN - 0168-583X

ER -