Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen

Marco Jacobs, Franz Bodart, Guy Terwagne, D. Schryvers, A. Poulet

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)231-237
Number of pages7
JournalNuclear instruments and methods in physics research B
Volume147
Publication statusPublished - 1999

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