Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen

Marco Jacobs, Franz Bodart, Guy Terwagne, D. Schryvers, A. Poulet

    Research output: Contribution to journalArticlepeer-review

    Original languageEnglish
    Pages (from-to)231-237
    Number of pages7
    JournalNuclear instruments and methods in physics research B
    Volume147
    Publication statusPublished - 1999

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