Nanohardness and structure of nitrogen implanted Si(x)Al(y) coatings post-implanted with oxygen

Keyphrases

• Nanohardness 100%
• Sialon 66%
• TEM Micrographs 33%
• Implantation Dose 33%
• High Temperature Applications 33%
• Oxygen Concentration 33%
• Thermal Properties 33%
• Mechanical Properties 33%
• Chemical Properties 33%
• Nitrogen Ion Implantation 33%
• Grain Formation 33%
• Chemical Bond 33%
• Substrate Surface 33%
• Columnar Structure 33%
• Depth Resolution 33%
• Film Structure 33%
• Gas Bubble 33%
• Solid Solution 33%
• DC Magnetron Sputtering 33%

INIS

• sialon 40%
• magnetrons 20%
• mechanical properties 20%
• chemical bonds 20%
• sputtering 20%
• thermal properties 20%
• solid solutions 20%
• pressure range giga pa 20%
• high temperature 20%

Material Science

• Nanohardness 100%
• Solid Solution 33%
• Thin Films 33%