Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental deposition

Romain Tonneau, Pavel Moskovkin, Jerome Muller, Emile Haye, Stephanos Konstantinidis, Andreas Pflug (Supervisor), Stephane Lucas (Supervisor)

Research output: Contribution to journal › Article › peer-review

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Chemistry

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