Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental deposition

Romain Tonneau, Pavel Moskovkin, Jerome Muller, Emile Haye, Stephanos Konstantinidis, Andreas Pflug (Supervisor), Stephane Lucas (Supervisor)

Research output: Contribution to journal › Article › peer-review

1 results
- Title(descending)
- Award date

Probing the physics of magnetron sputtering for thin-film deposition by Virtual Coater: application to TiO2
Author: Tonneau, R., 18 Jan 2021
Supervisor: Lucas, S. (Supervisor), Pflug, A. (External person) (Co-Supervisor), Henrard, L. (President), Moskovkin, P. (Jury), De Bosscher, W. (External person) (Jury), Konstantinidis, S. (External person) (Jury) & von Keudell, A. (External person) (Jury)
Student thesis: Doc types › Doctor of Sciences

File