Experimental and theoretical study of a magnetron DC-PECVD acetylene discharge: Identification of the deposition precursors and film growth mechanisms

A. Fauroux, A. Pflug, S. Lucas

Research output: Contribution to journal › Article › peer-review

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Synthesis, Irradiation and Analysis of Materials (SIAM)
Pierre Louette (Manager), Julien Colaux (Manager), Alexandre Felten (Manager), Tijani Tabarrant (Operator), Frederic COME (Operator) & Paul-Louis Debarsy (Manager)
Technological Platform Synthesis, Irradiation and Analysis of Materials
Facility/equipment: Technological Platform