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Evolution of nanoripples on silicon by gas cluster-ion irradiation
Omar Lozano Garcia, Q. Y. Chen, B. P. Tilakaratne, H. W. Seo, X. M. Wang, P. V. Wadekar, P. V. Chinta, L. W. Tu, N. J. Ho, D. Wijesundera, W. K. Chu
Research output: Contribution to journal › Article › peer-review