ToF-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO₂/Al₂O₃oxides

Engineering

• Surfaces 100%
• Energy Engineering 100%
• Thin Films 100%
• Depletion 100%
• Cycles 100%
• Si Substrate 100%
• Film Surface 100%
• Enhancement 100%
• Concentration Ratio 100%

Chemistry

• Phase Composition 100%
• Depth Profiling 100%
• Liquid Film 100%
• Secondary Ion Mass Spectroscopy 100%
• Surface 50%
• Metal 50%
• Number 25%
• Concentration 25%
• Energy 25%
• Ion 25%
• Xenon Ion 25%
• Oxide 25%

Material Science

• Surface 100%
• Film 100%
• Secondary Ion Mass Spectrometry 100%
• Metal 50%
• Oxide 50%
• Thin Films 50%
• Metal Deposition 50%