TEM Characterization of polysilicon and silicide fin fabrication processes of FinFETs

J. Ratajczak, A. Laszcz, A. Czerwinski, J. Katcki, Xiaohui Tang, Nicolas Reckinger, D.A. Yarekha, G. Larrieu, E. Dubois

Résultats de recherche: Contribution à un événement scientifique (non publié)Résumé

langue originaleAnglais
étatPublié - 2009
Evénement3rd National Conference on Nanotechnology - Warsaw, Pologne
Durée: 22 juin 200926 juin 2009

Comité scientifique

Comité scientifique3rd National Conference on Nanotechnology
PaysPologne
La villeWarsaw
période22/06/0926/06/09

Citer ceci

Ratajczak, J., Laszcz, A., Czerwinski, A., Katcki, J., Tang, X., Reckinger, N., ... Dubois, E. (2009). TEM Characterization of polysilicon and silicide fin fabrication processes of FinFETs. Résumé de 3rd National Conference on Nanotechnology, Warsaw, Pologne.
Ratajczak, J. ; Laszcz, A. ; Czerwinski, A. ; Katcki, J. ; Tang, Xiaohui ; Reckinger, Nicolas ; Yarekha, D.A. ; Larrieu, G. ; Dubois, E. / TEM Characterization of polysilicon and silicide fin fabrication processes of FinFETs. Résumé de 3rd National Conference on Nanotechnology, Warsaw, Pologne.
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title = "TEM Characterization of polysilicon and silicide fin fabrication processes of FinFETs",
author = "J. Ratajczak and A. Laszcz and A. Czerwinski and J. Katcki and Xiaohui Tang and Nicolas Reckinger and D.A. Yarekha and G. Larrieu and E. Dubois",
year = "2009",
language = "English",
note = "3rd National Conference on Nanotechnology ; Conference date: 22-06-2009 Through 26-06-2009",

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Ratajczak, J, Laszcz, A, Czerwinski, A, Katcki, J, Tang, X, Reckinger, N, Yarekha, DA, Larrieu, G & Dubois, E 2009, 'TEM Characterization of polysilicon and silicide fin fabrication processes of FinFETs', 3rd National Conference on Nanotechnology, Warsaw, Pologne, 22/06/09 - 26/06/09.

TEM Characterization of polysilicon and silicide fin fabrication processes of FinFETs. / Ratajczak, J.; Laszcz, A.; Czerwinski, A.; Katcki, J.; Tang, Xiaohui; Reckinger, Nicolas; Yarekha, D.A.; Larrieu, G.; Dubois, E.

2009. Résumé de 3rd National Conference on Nanotechnology, Warsaw, Pologne.

Résultats de recherche: Contribution à un événement scientifique (non publié)Résumé

TY - CONF

T1 - TEM Characterization of polysilicon and silicide fin fabrication processes of FinFETs

AU - Ratajczak, J.

AU - Laszcz, A.

AU - Czerwinski, A.

AU - Katcki, J.

AU - Tang, Xiaohui

AU - Reckinger, Nicolas

AU - Yarekha, D.A.

AU - Larrieu, G.

AU - Dubois, E.

PY - 2009

Y1 - 2009

M3 - Abstract

ER -

Ratajczak J, Laszcz A, Czerwinski A, Katcki J, Tang X, Reckinger N et al.. TEM Characterization of polysilicon and silicide fin fabrication processes of FinFETs. 2009. Résumé de 3rd National Conference on Nanotechnology, Warsaw, Pologne.