TEM Characterization of polysilicon and silicide fin fabrication processes of FinFETs

J. Ratajczak, A. Laszcz, A. Czerwinski, J. Katcki, Xiaohui Tang, Nicolas Reckinger, D.A. Yarekha, G. Larrieu, E. Dubois

    Research output: Contribution to conferenceAbstractpeer-review

    Original languageEnglish
    Publication statusPublished - 2009
    Event3rd National Conference on Nanotechnology - Warsaw, Poland
    Duration: 22 Jun 200926 Jun 2009

    Scientific committee

    Scientific committee3rd National Conference on Nanotechnology
    CountryPoland
    CityWarsaw
    Period22/06/0926/06/09

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