Polymer dielectric treatment using ultraviolet-ozone: A photoelectron spectroscopy and ellipsometric porosimetry study

Quoc Toan Le; C. M. Whelan; H. Struyf; S. Vanhaelemeersch; A. Azioune; P. Louette; J. J. Pireaux; K. Maex

doi:10.1063/1.1775049

Polymer dielectric treatment using ultraviolet-ozone: A photoelectron spectroscopy and ellipsometric porosimetry study

Quoc Toan Le, C. M. Whelan, H. Struyf, S. Vanhaelemeersch, A. Azioune, P. Louette, J. J. Pireaux, K. Maex

Résultats de recherche: Contribution à un journal/une revue › Article › Revue par des pairs

Résumé

The treatment of polyarylene with ultraviolet ozone was studied using contact angle measurements, x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The film surface was found to be modified after a short exposure time (30s). Longer treatment time was found to lead to a further increase in oxygen concentration, formation of an oxidized surface layer, and densification of the film. Further increase in the exposure time was found to lead to a substantial change in film thickness and an increase in the refractive index.

langue originale	Anglais
Pages (de - à)	3807-3810
Nombre de pages	4
journal	Journal of Applied Physics
Volume	96
Numéro de publication	7
Les DOIs	https://doi.org/10.1063/1.1775049
Etat de la publication	Publié - 1 oct. 2004

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10.1063/1.1775049

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title = "Polymer dielectric treatment using ultraviolet-ozone: A photoelectron spectroscopy and ellipsometric porosimetry study",

abstract = "The treatment of polyarylene with ultraviolet ozone was studied using contact angle measurements, x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The film surface was found to be modified after a short exposure time (30s). Longer treatment time was found to lead to a further increase in oxygen concentration, formation of an oxidized surface layer, and densification of the film. Further increase in the exposure time was found to lead to a substantial change in film thickness and an increase in the refractive index.",

author = "Le, {Quoc Toan} and Whelan, {C. M.} and H. Struyf and S. Vanhaelemeersch and A. Azioune and P. Louette and Pireaux, {J. J.} and K. Maex",

year = "2004",

month = oct,

day = "1",

doi = "10.1063/1.1775049",

language = "English",

volume = "96",

pages = "3807--3810",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American institute of physics",

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TY - JOUR

T1 - Polymer dielectric treatment using ultraviolet-ozone

T2 - A photoelectron spectroscopy and ellipsometric porosimetry study

AU - Le, Quoc Toan

AU - Whelan, C. M.

AU - Struyf, H.

AU - Vanhaelemeersch, S.

AU - Azioune, A.

AU - Louette, P.

AU - Pireaux, J. J.

AU - Maex, K.

PY - 2004/10/1

Y1 - 2004/10/1

N2 - The treatment of polyarylene with ultraviolet ozone was studied using contact angle measurements, x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The film surface was found to be modified after a short exposure time (30s). Longer treatment time was found to lead to a further increase in oxygen concentration, formation of an oxidized surface layer, and densification of the film. Further increase in the exposure time was found to lead to a substantial change in film thickness and an increase in the refractive index.

AB - The treatment of polyarylene with ultraviolet ozone was studied using contact angle measurements, x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The film surface was found to be modified after a short exposure time (30s). Longer treatment time was found to lead to a further increase in oxygen concentration, formation of an oxidized surface layer, and densification of the film. Further increase in the exposure time was found to lead to a substantial change in film thickness and an increase in the refractive index.

UR - http://www.scopus.com/inward/record.url?scp=7044248191&partnerID=8YFLogxK

U2 - 10.1063/1.1775049

DO - 10.1063/1.1775049

M3 - Article

AN - SCOPUS:7044248191

SN - 0021-8979

VL - 96

SP - 3807

EP - 3810

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

ER -

Polymer dielectric treatment using ultraviolet-ozone: A photoelectron spectroscopy and ellipsometric porosimetry study

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