The treatment of polyarylene with ultraviolet ozone was studied using contact angle measurements, x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The film surface was found to be modified after a short exposure time (30s). Longer treatment time was found to lead to a further increase in oxygen concentration, formation of an oxidized surface layer, and densification of the film. Further increase in the exposure time was found to lead to a substantial change in film thickness and an increase in the refractive index.
|Number of pages||4|
|Journal||Journal of Applied Physics|
|Publication status||Published - 1 Oct 2004|