Polymer dielectric treatment using ultraviolet-ozone: A photoelectron spectroscopy and ellipsometric porosimetry study

Quoc Toan Le, C. M. Whelan, H. Struyf, S. Vanhaelemeersch, A. Azioune, P. Louette, J. J. Pireaux, K. Maex

    Research output: Contribution to journalArticlepeer-review

    Abstract

    The treatment of polyarylene with ultraviolet ozone was studied using contact angle measurements, x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The film surface was found to be modified after a short exposure time (30s). Longer treatment time was found to lead to a further increase in oxygen concentration, formation of an oxidized surface layer, and densification of the film. Further increase in the exposure time was found to lead to a substantial change in film thickness and an increase in the refractive index.

    Original languageEnglish
    Pages (from-to)3807-3810
    Number of pages4
    JournalJournal of Applied Physics
    Volume96
    Issue number7
    DOIs
    Publication statusPublished - 1 Oct 2004

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