Abstract
The treatment of polyarylene with ultraviolet ozone was studied using contact angle measurements, x-ray photoelectron spectroscopy, spectroscopic ellipsometry, and ellipsometric porosimetry. The film surface was found to be modified after a short exposure time (30s). Longer treatment time was found to lead to a further increase in oxygen concentration, formation of an oxidized surface layer, and densification of the film. Further increase in the exposure time was found to lead to a substantial change in film thickness and an increase in the refractive index.
Original language | English |
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Pages (from-to) | 3807-3810 |
Number of pages | 4 |
Journal | Journal of Applied Physics |
Volume | 96 |
Issue number | 7 |
DOIs | |
Publication status | Published - 1 Oct 2004 |