Channeling and low energy electron induced X-ray spectroscopy on neon implanted beryllium single crystal

Benoit Cornil Deconninck, Franz Bodart

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    Using the Rutherford Backscattering Spectrometry-Channelling (RBS-C) method which is able to provide information on the lattice location of the implanted atoms, we have tried to show that when neon is implanted into metals it has the same behaviour as other heavier noble gases. The work has been divided in two parts. First we had to settle the neon implanted dose to obtain solid inclusions without destroying the crystallinity of the matrix. This information was obtained by measuring the pressure in the bubbles by means of soft X-ray emission spectroscopy: the broadening of the neon Kα X-ray line shows the existence of a band structure correlated with the shear modulus of the implanted metal and the pressure of the implanted neon. From these results it appears that beryllium is a good candidate for channelling measurements when it is implanted in doses as low as 1016Ne/cm2. The second part of the work contains RBS-C measurements along the 〈0 0 0 1〉 axial channel and the (0 1 0), (1 1 0) and planar channel; the results seem to indicate that the solid neon inclusions are platelets aligned with the (0 0 0 1) plane. Investigations with TEM are in progress to confirm the results.
    langue originaleAnglais
    Pages (de - à)410-414
    Nombre de pages5
    journalNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
    Les DOIs
    Etat de la publicationPublié - 1998

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