TY - JOUR
T1 - Channeling and low energy electron induced X-ray spectroscopy on neon implanted beryllium single crystal
AU - Deconninck, Benoit Cornil
AU - Bodart, Franz
PY - 1998
Y1 - 1998
N2 - Using the Rutherford Backscattering Spectrometry-Channelling (RBS-C) method which is able to provide information on the lattice location of the implanted atoms, we have tried to show that when neon is implanted into metals it has the same behaviour as other heavier noble gases. The work has been divided in two parts. First we had to settle the neon implanted dose to obtain solid inclusions without destroying the crystallinity of the matrix. This information was obtained by measuring the pressure in the bubbles by means of soft X-ray emission spectroscopy: the broadening of the neon Kα X-ray line shows the existence of a band structure correlated with the shear modulus of the implanted metal and the pressure of the implanted neon. From these results it appears that beryllium is a good candidate for channelling measurements when it is implanted in doses as low as 1016Ne/cm2. The second part of the work contains RBS-C measurements along the 〈0 0 0 1〉 axial channel and the (0 1 0), (1 1 0) and planar channel; the results seem to indicate that the solid neon inclusions are platelets aligned with the (0 0 0 1) plane. Investigations with TEM are in progress to confirm the results.
AB - Using the Rutherford Backscattering Spectrometry-Channelling (RBS-C) method which is able to provide information on the lattice location of the implanted atoms, we have tried to show that when neon is implanted into metals it has the same behaviour as other heavier noble gases. The work has been divided in two parts. First we had to settle the neon implanted dose to obtain solid inclusions without destroying the crystallinity of the matrix. This information was obtained by measuring the pressure in the bubbles by means of soft X-ray emission spectroscopy: the broadening of the neon Kα X-ray line shows the existence of a band structure correlated with the shear modulus of the implanted metal and the pressure of the implanted neon. From these results it appears that beryllium is a good candidate for channelling measurements when it is implanted in doses as low as 1016Ne/cm2. The second part of the work contains RBS-C measurements along the 〈0 0 0 1〉 axial channel and the (0 1 0), (1 1 0) and planar channel; the results seem to indicate that the solid neon inclusions are platelets aligned with the (0 0 0 1) plane. Investigations with TEM are in progress to confirm the results.
U2 - 10.1016/S0168-583X(97)00712-X
DO - 10.1016/S0168-583X(97)00712-X
M3 - Article
SN - 0168-583X
VL - 136-138
SP - 410
EP - 414
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ER -