An integrated UHV system for the preparation and characterization of thin metallic, semiconducting, and insulating films or compounds

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langue originale	Français
Pages (de - à)	1208-1209
Nombre de pages	2
journal	Journal of Vacuum Science and Technology A
Volume	2
Etat de la publication	Publié - 1984

Contient cette citation

@article{162db144be254b588a6de6c375db7df9,

title = "An integrated UHV system for the preparation and characterization of thin metallic, semiconducting, and insulating films or compounds",

author = "Jean-Jacques Pireaux and Jean-Pol Delrue and Paul Thiry and Roland Caudano",

year = "1984",

language = "Fran{\c c}ais",

volume = "2",

pages = "1208--1209",

journal = "Journal of Vacuum Science and Technology A",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - An integrated UHV system for the preparation and characterization of thin metallic, semiconducting, and insulating films or compounds

AU - Pireaux, Jean-Jacques

AU - Delrue, Jean-Pol

AU - Thiry, Paul

AU - Caudano, Roland

PY - 1984

Y1 - 1984

M3 - Article

VL - 2

SP - 1208

EP - 1209

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

ER -