XPS study of ion induced oxidation of silicon with and without oxygen flooding

Hilde De Witte, Thierry Conard, Robert Sporken, Rachel Gouttebaron, Raphaël Magnée, Wilfried Vandervorst, Roland Caudano, Renaat Gijbels

    Research output: Contribution to journalLiterature review

    Original languageEnglish
    Pages (from-to)73-76
    Number of pages4
    JournalSecondary Ion Mass Spectrometry SIMS XII
    Publication statusPublished - 2000

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