XPS study of ion induced oxidation of silicon with and without oxygen flooding

Hilde De Witte; Thierry Conard; Robert Sporken; Rachel Gouttebaron; Raphaël Magnée; Wilfried Vandervorst; Roland Caudano; Renaat Gijbels

XPS study of ion induced oxidation of silicon with and without oxygen flooding

Hilde De Witte, Thierry Conard, Robert Sporken, Rachel Gouttebaron, Raphaël Magnée, Wilfried Vandervorst, Roland Caudano, Renaat Gijbels

Research output: Contribution to journal › Literature review

Original language	English
Pages (from-to)	73-76
Number of pages	4
Journal	Secondary Ion Mass Spectrometry SIMS XII
Publication status	Published - 2000

Cite this

@article{c445dd7d1a5b46b9a053a62b28662683,

title = "XPS study of ion induced oxidation of silicon with and without oxygen flooding",

author = "{De Witte}, Hilde and Thierry Conard and Robert Sporken and Rachel Gouttebaron and Rapha{\"e}l Magn{\'e}e and Wilfried Vandervorst and Roland Caudano and Renaat Gijbels",

year = "2000",

language = "English",

pages = "73--76",

journal = "Secondary Ion Mass Spectrometry SIMS XII",

}

TY - JOUR

T1 - XPS study of ion induced oxidation of silicon with and without oxygen flooding

AU - De Witte, Hilde

AU - Conard, Thierry

AU - Sporken, Robert

AU - Gouttebaron, Rachel

AU - Magnée, Raphaël

AU - Vandervorst, Wilfried

AU - Caudano, Roland

AU - Gijbels, Renaat

PY - 2000

Y1 - 2000

M3 - Literature review

SP - 73

EP - 76

JO - Secondary Ion Mass Spectrometry SIMS XII

JF - Secondary Ion Mass Spectrometry SIMS XII

ER -