Surface characterization of a low dielectric constant polymer-SiLK* polymer, and investigation of its interface with Cu

Aparna Rajagopal; Chantal Grégoire; Jean-Jacques Lemaire; Jean-Jacques Pireaux; Mikhail Baklanov; Serge Vanhaelemeersch; Karen Maex; Joost Waeterloos

Surface characterization of a low dielectric constant polymer-SiLK* polymer, and investigation of its interface with Cu

Aparna Rajagopal, Chantal Grégoire, Jean-Jacques Lemaire, Jean-Jacques Pireaux, Mikhail Baklanov, Serge Vanhaelemeersch, Karen Maex, Joost Waeterloos

Namur Research Institute for Life Sciences

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	2336-2340
Number of pages	5
Journal	Journal of vacuum science and technology. B
Volume	17
Issue number	5
Publication status	Published - 1999

Cite this

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title = "Surface characterization of a low dielectric constant polymer-SiLK* polymer, and investigation of its interface with Cu",

author = "Aparna Rajagopal and Chantal Gr{\'e}goire and Jean-Jacques Lemaire and Jean-Jacques Pireaux and Mikhail Baklanov and Serge Vanhaelemeersch and Karen Maex and Joost Waeterloos",

note = "Publication code : **RES. ACAD.",

year = "1999",

language = "English",

volume = "17",

pages = "2336--2340",

journal = "Journal of vacuum science and technology. B",

publisher = "AVS Science and Technology Society",

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TY - JOUR

T1 - Surface characterization of a low dielectric constant polymer-SiLK* polymer, and investigation of its interface with Cu

AU - Rajagopal, Aparna

AU - Grégoire, Chantal

AU - Lemaire, Jean-Jacques

AU - Pireaux, Jean-Jacques

AU - Baklanov, Mikhail

AU - Vanhaelemeersch, Serge

AU - Maex, Karen

AU - Waeterloos, Joost

N1 - Publication code : **RES. ACAD.

PY - 1999

Y1 - 1999

M3 - Article

VL - 17

SP - 2336

EP - 2340

JO - Journal of vacuum science and technology. B

JF - Journal of vacuum science and technology. B

IS - 5

ER -