Surface characterization of a low dielectric constant polymer-SiLK* polymer, and investigation of its interface with Cu

Aparna Rajagopal, Chantal Grégoire, Jean-Jacques Lemaire, Jean-Jacques Pireaux, Mikhail Baklanov, Serge Vanhaelemeersch, Karen Maex, Joost Waeterloos

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)2336-2340
Number of pages5
JournalJournal of vacuum science and technology. B
Issue number5
Publication statusPublished - 1999

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