Issues associated to rare earth silicide integration in ultra thin FD SOI Schottky barrier nMOSFETs

G. Larrieu, D.A. Yarekha, E. Dubois, D. Deresmes, N. Breil, N. Reckinger, X. Tang, A. Halimaoui

    Research output: Contribution in Book/Catalog/Report/Conference proceedingConference contribution

    Fingerprint

    Dive into the research topics of 'Issues associated to rare earth silicide integration in ultra thin FD SOI Schottky barrier nMOSFETs'. Together they form a unique fingerprint.

    Material Science