Ion-induced densification of PVD films - a choice of the optimum density of ion bombardement

G.I. Grigorov, K.G. Grigorov, Robert Sporken, Roland Caudano

Research output: Contribution to journal › Article › peer-review

Cite this

@article{434cc11948494c43a9a55dc5ecc0d8dc,

title = "Ion-induced densification of PVD films - a choice of the optimum density of ion bombardement",

author = "G.I. Grigorov and K.G. Grigorov and Robert Sporken and Roland Caudano",

year = "1996",

language = "English",

volume = "63",

pages = "399--401",

journal = "Appl. Phys. A",

issn = "0947-8396",

publisher = "Springer Heidelberg",

}