Ion-induced densification of PVD films - a choice of the optimum density of ion bombardement

G.I. Grigorov, K.G. Grigorov, Robert Sporken, Roland Caudano

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@article{434cc11948494c43a9a55dc5ecc0d8dc,

title = "Ion-induced densification of PVD films - a choice of the optimum density of ion bombardement",

author = "G.I. Grigorov and K.G. Grigorov and Robert Sporken and Roland Caudano",

year = "1996",

language = "English",

volume = "63",

pages = "399--401",

journal = "Applied Physics A, Materials Science and Processing",

issn = "0947-8396",

publisher = "Springer Heidelberg",

}

TY - JOUR

T1 - Ion-induced densification of PVD films - a choice of the optimum density of ion bombardement

AU - Grigorov, G.I.

AU - Grigorov, K.G.

AU - Sporken, Robert

AU - Caudano, Roland

PY - 1996

Y1 - 1996

M3 - Article

VL - 63

SP - 399

EP - 401

JO - Applied Physics A, Materials Science and Processing

JF - Applied Physics A, Materials Science and Processing

SN - 0947-8396

ER -