Growth mechanisms involved in the synthesis of smooth and microtextured films by acetylene magnetron discharges

V. De Vriendt, S.M. Miladinovic, Julien Colaux, F. Maseri, C.L. Wilkins, S. Lucas

Research output: Contribution to journalArticle


The growth of hydrogenated amorphous carbons (a-C:H) produced by continuous or pulsed discharges of acetylene (C H ) in an unbalanced magnetron setup was investigated. At 5 × 10 Torr, only smooth films are obtained, whereas at 5 × 10 Torr using a pulsed discharge some microtextured films are formed if the duty cycle is low. The morphology of these microtextured films consists of nanoparticles, filamentary particles, and particular agglomerates ("microflowers"). This paper presents a study of acetylene gas phase polymerization by mass spectrometry, and a detailed analysis of bulk structure of films by combining three techniques which include IR spectroscopy, Raman spectroscopy, and laser desorption/ionization Fourier transform mass spectrometry (LDI-FTMS). Finally, based on the study of gas phase and film structure, we propose a model for the growth of both smooth and microtextured films. © 2011 American Chemical Society.
Original languageEnglish
Pages (from-to)8913-8922
Number of pages10
Issue number14
Publication statusPublished - 19 Jul 2011


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