Growth mechanisms involved in the synthesis of smooth and microtextured films by acetylene magnetron discharges

V. De Vriendt, S.M. Miladinovic, Julien Colaux, F. Maseri, C.L. Wilkins, S. Lucas

Research output: Contribution to journalArticle

Abstract

The growth of hydrogenated amorphous carbons (a-C:H) produced by continuous or pulsed discharges of acetylene (C H ) in an unbalanced magnetron setup was investigated. At 5 × 10 Torr, only smooth films are obtained, whereas at 5 × 10 Torr using a pulsed discharge some microtextured films are formed if the duty cycle is low. The morphology of these microtextured films consists of nanoparticles, filamentary particles, and particular agglomerates ("microflowers"). This paper presents a study of acetylene gas phase polymerization by mass spectrometry, and a detailed analysis of bulk structure of films by combining three techniques which include IR spectroscopy, Raman spectroscopy, and laser desorption/ionization Fourier transform mass spectrometry (LDI-FTMS). Finally, based on the study of gas phase and film structure, we propose a model for the growth of both smooth and microtextured films. © 2011 American Chemical Society.
Original languageEnglish
Pages (from-to)8913-8922
Number of pages10
JournalLangmuir
Volume27
Issue number14
DOIs
Publication statusPublished - 19 Jul 2011

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Acetylene
acetylene
synthesis
Mass spectrometry
mass spectroscopy
Gases
vapor phases
Raman lasers
Amorphous carbon
Ionization
Raman spectroscopy
Infrared spectroscopy
Desorption
Fourier transforms
polymerization
desorption
Polymerization
Nanoparticles
ionization
nanoparticles

Cite this

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title = "Growth mechanisms involved in the synthesis of smooth and microtextured films by acetylene magnetron discharges",
abstract = "The growth of hydrogenated amorphous carbons (a-C:H) produced by continuous or pulsed discharges of acetylene (C H ) in an unbalanced magnetron setup was investigated. At 5 × 10 Torr, only smooth films are obtained, whereas at 5 × 10 Torr using a pulsed discharge some microtextured films are formed if the duty cycle is low. The morphology of these microtextured films consists of nanoparticles, filamentary particles, and particular agglomerates ({"}microflowers{"}). This paper presents a study of acetylene gas phase polymerization by mass spectrometry, and a detailed analysis of bulk structure of films by combining three techniques which include IR spectroscopy, Raman spectroscopy, and laser desorption/ionization Fourier transform mass spectrometry (LDI-FTMS). Finally, based on the study of gas phase and film structure, we propose a model for the growth of both smooth and microtextured films. {\circledC} 2011 American Chemical Society.",
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Growth mechanisms involved in the synthesis of smooth and microtextured films by acetylene magnetron discharges. / De Vriendt, V.; Miladinovic, S.M.; Colaux, Julien; Maseri, F.; Wilkins, C.L.; Lucas, S.

In: Langmuir, Vol. 27, No. 14, 19.07.2011, p. 8913-8922.

Research output: Contribution to journalArticle

TY - JOUR

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AU - De Vriendt, V.

AU - Miladinovic, S.M.

AU - Colaux, Julien

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AU - Wilkins, C.L.

AU - Lucas, S.

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