Characterization of the DC reactive magnetron discharge during the sputtering of silicon in nitrogen/argon/hydrogen plasma

Abdelkrim Batan, François Reniers

Research output: Working paper

Original languageEnglish
Publication statusUnpublished - 2008

Cite this

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title = "Characterization of the DC reactive magnetron discharge during the sputtering of silicon in nitrogen/argon/hydrogen plasma",
author = "Abdelkrim Batan and Fran{\cc}ois Reniers",
year = "2008",
language = "English",
type = "WorkingPaper",

}

TY - UNPB

T1 - Characterization of the DC reactive magnetron discharge during the sputtering of silicon in nitrogen/argon/hydrogen plasma

AU - Batan, Abdelkrim

AU - Reniers, François

PY - 2008

Y1 - 2008

M3 - Working paper

BT - Characterization of the DC reactive magnetron discharge during the sputtering of silicon in nitrogen/argon/hydrogen plasma

ER -