| langue originale | Anglais |
|---|---|
| Etat de la publication | Non publié - 2008 |
Contient cette citation
Batan, A., & Reniers, F. (2008). Characterization of the DC reactive magnetron discharge during the sputtering of silicon in nitrogen/argon/hydrogen plasma.
Characterization of the DC reactive magnetron discharge during the sputtering of silicon in nitrogen/argon/hydrogen plasma
Abdelkrim Batan, François Reniers
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