Original language | English |
---|---|
Publication status | Unpublished - 2008 |
Characterization of silicon nitride thin films deposited by plasma magnetron
Abdelkrim Batan, Alexis Franquet, Jean Vereecken, François Reniers
Research output: Working paper
Abdelkrim Batan, Alexis Franquet, Jean Vereecken, François Reniers
Research output: Working paper
Original language | English |
---|---|
Publication status | Unpublished - 2008 |