Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma

Carla Bittencourt Papaleo Montes

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)603-606
Number of pages4
JournalSurface and interface analysis
Volume30
Issue number1
Publication statusPublished - 2000

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