Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma

Carla Bittencourt Papaleo Montes

    Research output: Contribution to journalArticle

    Original languageEnglish
    Pages (from-to)603-606
    Number of pages4
    JournalSurface and interface analysis
    Volume30
    Issue number1
    Publication statusPublished - 2000

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