Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)603-606
Number of pages4
JournalSurface and interface analysis
Volume30
Issue number1
Publication statusPublished - 2000

Cite this

@article{f4f4d9a3060a4231bd1f6f785f880f01,
title = "Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma",
author = "{Bittencourt Papaleo Montes}, Carla",
year = "2000",
language = "English",
volume = "30",
pages = "603--606",
journal = "Surface and interface analysis",
issn = "0142-2421",
publisher = "John Wiley and Sons Ltd",
number = "1",

}

TY - JOUR

T1 - Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma

AU - Bittencourt Papaleo Montes, Carla

PY - 2000

Y1 - 2000

M3 - Article

VL - 30

SP - 603

EP - 606

JO - Surface and interface analysis

JF - Surface and interface analysis

SN - 0142-2421

IS - 1

ER -