Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma

Carla Bittencourt Papaleo Montes

Résultats de recherche: Contribution à un journal/une revueArticle

langue originaleAnglais
Pages (de - à)603-606
Nombre de pages4
journalSurface and interface analysis
Volume30
Numéro de publication1
étatPublié - 2000

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title = "Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma",
author = "{Bittencourt Papaleo Montes}, Carla",
year = "2000",
language = "English",
volume = "30",
pages = "603--606",
journal = "Surface and interface analysis",
issn = "0142-2421",
publisher = "John Wiley and Sons Ltd",
number = "1",

}

Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma. / Bittencourt Papaleo Montes, Carla.

Dans: Surface and interface analysis, Vol 30, Numéro 1, 2000, p. 603-606.

Résultats de recherche: Contribution à un journal/une revueArticle

TY - JOUR

T1 - Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma

AU - Bittencourt Papaleo Montes, Carla

PY - 2000

Y1 - 2000

M3 - Article

VL - 30

SP - 603

EP - 606

JO - Surface and interface analysis

JF - Surface and interface analysis

SN - 0142-2421

IS - 1

ER -