Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma

Carla Bittencourt Papaleo Montes

Résultats de recherche: Contribution à un journal/une revue › Article

langue originale	Anglais
Pages (de - à)	603-606
Nombre de pages	4
journal	Surface and interface analysis
Volume	30
Numéro de publication	1
Etat de la publication	Publié - 2000

Contient cette citation

@article{f4f4d9a3060a4231bd1f6f785f880f01,

title = "Characterisation of SiC Buffer Layer Formation by Reaction of Si (100) Surface with Methane+Hydrogen Plasma",

author = "{Bittencourt Papaleo Montes}, Carla",

year = "2000",

language = "English",

volume = "30",

pages = "603--606",

journal = "Surface and interface analysis",

publisher = "John Wiley and Sons Ltd",

number = "1",

}