Aluminium and silicon determination on two Si-Al sputter targets used for magnetron sputtering

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Original languageEnglish
Pages (from-to)683-688
Number of pages6
JournalNuclear instruments and methods in physics research B
Volume158
Publication statusPublished - 1999

Cite this

@article{95e092986c4246fe8df2899862a70e3f,
title = "Aluminium and silicon determination on two Si-Al sputter targets used for magnetron sputtering",
author = "Guy Terwagne and Franz Bodart",
note = "Publication code : **RES. ACAD.",
year = "1999",
language = "English",
volume = "158",
pages = "683--688",
journal = "Nuclear Instruments and Methods in Physical Research B",
issn = "0168-583X",
publisher = "Elsevier",

}

TY - JOUR

T1 - Aluminium and silicon determination on two Si-Al sputter targets used for magnetron sputtering

AU - Terwagne, Guy

AU - Bodart, Franz

N1 - Publication code : **RES. ACAD.

PY - 1999

Y1 - 1999

M3 - Article

VL - 158

SP - 683

EP - 688

JO - Nuclear Instruments and Methods in Physical Research B

JF - Nuclear Instruments and Methods in Physical Research B

SN - 0168-583X

ER -