Aluminium and silicon determination on two Si-Al sputter targets used for magnetron sputtering

Résultats de recherche: Contribution à un journal/une revue › Article › Revue par des pairs

109 Téléchargements (Pure)

langue originale	Anglais
Pages (de - à)	683-688
Nombre de pages	6
journal	Nuclear instruments and methods in physics research B
Volume	158
Etat de la publication	Publié - 1999

Accès au document

@article{95e092986c4246fe8df2899862a70e3f,

title = "Aluminium and silicon determination on two Si-Al sputter targets used for magnetron sputtering",

author = "Guy Terwagne and Franz Bodart",

note = "Publication code : **RES. ACAD.",

year = "1999",

language = "English",

volume = "158",

pages = "683--688",

journal = "Nuclear instruments and methods in physics research B",

issn = "1872-9584",

publisher = "Elsevier",

}

TY - JOUR

T1 - Aluminium and silicon determination on two Si-Al sputter targets used for magnetron sputtering

AU - Terwagne, Guy

AU - Bodart, Franz

N1 - Publication code : **RES. ACAD.

PY - 1999

Y1 - 1999

M3 - Article

SN - 1872-9584

VL - 158

SP - 683

EP - 688

JO - Nuclear instruments and methods in physics research B

JF - Nuclear instruments and methods in physics research B

ER -