EVC-8, European Vacuum Congress

Activity: Participating in or organising an event typesParticipation in conference


<X-ray photoelectron spectroscopy characterization of high-k dielectric Al2O3 and HfO2 layers deposited on SiO2/Si surface > ; R. Vitchev, J.-J. Pireaux, T. Conard, H. Bender, J. Wolstenholme, Ch. Defranoux
Period23 Jun 200326 Jun 2003
Event typeConference
LocationBerlin, DeutschlandShow on map