AVS 1st international conference on advanced materials and processes for the microelectronics

Pireaux, J. (Contributor)

University of Namur

Activity: Participating in or organising an event types › Participation in conference

Description

Communication orale: "Surface characterization of a low-dielectric-constant polymer - SilK polymer and investigation of its interface with Cu". Co-auteurs: A. Rajagopal, C. Gregoire, J.-J. Lemaire, M. Baklanov, S. Vanhaelemeersch, K. Maex & J.-J. Waeterlo

Period	15 Mar 1999 → 19 Mar 1999
Event type	Conference
Location	San Diego, Etats-UnisShow on map