AVS 1st international conference on advanced materials and processes for the microelectronics

Activity: Participating in or organising an event typesParticipation in conference


Communication orale: "Surface characterization of a low-dielectric-constant polymer - SilK polymer and investigation of its interface with Cu". Co-auteurs: A. Rajagopal, C. Gregoire, J.-J. Lemaire, M. Baklanov, S. Vanhaelemeersch, K. Maex & J.-J. Waeterlo
Period15 Mar 199919 Mar 1999
Event typeConference
LocationSan Diego, Etats-UnisShow on map