TY - JOUR
T1 - Self-aligned silicon-on-insulator nano flash memory device
AU - Tang, X.
AU - Baie, X.
AU - Colinge, J.P.
AU - Crahay, A.
AU - Katschmarsyj, B.
AU - Scheuren, V.
AU - Spôte, D.
AU - Reckinger, N.
AU - Van De Wiele, F.
AU - Bayot, V.
PY - 2000/12/1
Y1 - 2000/12/1
N2 - This paper reports on the fabrication of a silicon-on-insulator nano flash memory device based on the differential oxidation rate of silicon resulting from gradients in the arsenic doping concentration. The key processes involved are the formation of the desired arsenic doping profile, electron beam lithography and wet oxidation. The resulting device is a triangular-channel MOSFET with a nanocrystal floating gate embedded in the gate oxide. The length, width and height of the nanocrystal are 10, 10 and 20 nm, respectively. As long as the control gate voltage does not exceed ±2V, the device behaves like a thin and narrow P-channel MOSFET. When a voltage of -5 or +5 V is applied to the control gate at room temperature, holes are injected into the floating gate or removed from it, respectively. This effect induces a persistent shift of the threshold voltage of the device, which acts as a miniature EEPROM.
AB - This paper reports on the fabrication of a silicon-on-insulator nano flash memory device based on the differential oxidation rate of silicon resulting from gradients in the arsenic doping concentration. The key processes involved are the formation of the desired arsenic doping profile, electron beam lithography and wet oxidation. The resulting device is a triangular-channel MOSFET with a nanocrystal floating gate embedded in the gate oxide. The length, width and height of the nanocrystal are 10, 10 and 20 nm, respectively. As long as the control gate voltage does not exceed ±2V, the device behaves like a thin and narrow P-channel MOSFET. When a voltage of -5 or +5 V is applied to the control gate at room temperature, holes are injected into the floating gate or removed from it, respectively. This effect induces a persistent shift of the threshold voltage of the device, which acts as a miniature EEPROM.
UR - http://www.scopus.com/inward/record.url?scp=0034499173&partnerID=8YFLogxK
U2 - 10.1016/S0038-1101(00)00221-5
DO - 10.1016/S0038-1101(00)00221-5
M3 - Article
AN - SCOPUS:0034499173
SN - 0038-1101
VL - 44
SP - 2259
EP - 2264
JO - Solid-State Electronics
JF - Solid-State Electronics
IS - 12
ER -