Influence of Substrate Temperature on Formation of SiC Buffer Layer by Reaction of Si(100) with Silane-Methane Plasma

Carla Bittencourt Papaleo Montes

Résultats de recherche: Contribution à un journal/une revue › Article

langue originale	Anglais
Pages (de - à)	1115-1118
Nombre de pages	4
journal	Semiconductor Science and Technology
Volume	15
Etat de la publication	Publié - 2000

Contient cette citation

@article{1efa39c21d1149abb2a1f9106ce12ec3,

title = "Influence of Substrate Temperature on Formation of SiC Buffer Layer by Reaction of Si(100) with Silane-Methane Plasma",

author = "{Bittencourt Papaleo Montes}, Carla",

year = "2000",

language = "English",

volume = "15",

pages = "1115--1118",

journal = "Semiconductor Science and Technology ",

issn = "1361-6641",

publisher = "IOP Publishing Ltd.",

}