Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosity study

[No Value] Quoc Toan Le; Caroline Whelan; H. Struyf; S. Vanhaelemrrsch; Ammar Azioune; Pierre Louette; Jean-Jacques Pireaux; K. Maex

Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosity study

[No Value] Quoc Toan Le, Caroline Whelan, H. Struyf, S. Vanhaelemrrsch, Ammar Azioune, Pierre Louette, Jean-Jacques Pireaux, K. Maex

Namur Research Institute for Life Sciences

Research output: Contribution to journal › Article

Original language	English
Pages (from-to)	3807-3810
Number of pages	4
Journal	Journal of Applied Physics
Volume	96
Issue number	7
Publication status	Published - 2004

Cite this

@article{fbe59e2e0972466088e780f17ee74199,

title = "Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosity study",

author = "{Quoc Toan Le}, {[No Value]} and Caroline Whelan and H. Struyf and S. Vanhaelemrrsch and Ammar Azioune and Pierre Louette and Jean-Jacques Pireaux and K. Maex",

year = "2004",

language = "English",

volume = "96",

pages = "3807--3810",

journal = "Journal of Applied Physics",

publisher = "American Institute of Physics Publising LLC",

number = "7",

}

TY - JOUR

T1 - Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosity study

AU - Quoc Toan Le, [No Value]

AU - Whelan, Caroline

AU - Struyf, H.

AU - Vanhaelemrrsch, S.

AU - Azioune, Ammar

AU - Louette, Pierre

AU - Pireaux, Jean-Jacques

AU - Maex, K.

PY - 2004

Y1 - 2004

M3 - Article

VL - 96

SP - 3807

EP - 3810

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 7

ER -