Polymer dielectric treatment using UV-ozone: a photoelectron spectroscopy and ellipsometric porosity study

[No Value] Quoc Toan Le, Caroline Whelan, H. Struyf, S. Vanhaelemrrsch, Ammar Azioune, Pierre Louette, Jean-Jacques Pireaux, K. Maex

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)3807-3810
Number of pages4
JournalJournal of Applied Physics
Issue number7
Publication statusPublished - 2004

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