AVS-ICMI 2003 : 4th International Conference on Microelectronics and Interfaces

Activity: Participating in or organising an event typesParticipation in conference


<Multitechnique characterization of Al2O3 thin layers deposited on SiO2/Si surface by ALCVD> L. Houssiau, R. Vitchev, J.J. Pireaux, Th. Conard, H. Bender, O. Richard, P. Macq, J. Wolstenholme and Ch. Defranoux
Period3 Mar 20036 Mar 2003
Event typeConference
LocationSanta Clara, USAShow on map