AVS-ICMI 2003 : 4th International Conference on Microelectronics and Interfaces

Pireaux, J. (Participant)

University of Namur

Activity: Participating in or organising an event types › Participation in conference

Description

<Multitechnique characterization of Al2O3 thin layers deposited on SiO2/Si surface by ALCVD> L. Houssiau, R. Vitchev, J.J. Pireaux, Th. Conard, H. Bender, O. Richard, P. Macq, J. Wolstenholme and Ch. Defranoux

Period	3 Mar 2003 → 6 Mar 2003
Event type	Conference
Location	Santa Clara, USAShow on map