Vertical two‐dimensional piezoelectric inertial slider for scanning tunneling microscope

To achieve both high stability during scanning tunneling microscopy (STM) measurements at atomic resolution and long‐range imaging of nonhomogeneous samples, we have developed a fully 2D vertical inertial nanopositioner which allows tunneling tip displacements in the 0.01–1000 μm range while keeping high‐resolution STM conditions. The inertial sliding of the tip is obtained by overriding the static friction criterion between the tip and its support. By controlling the expansion of the piezotubes and the direction of the applied acceleration, one can obtain displacements as small as 100 Å in the vertical direction. The same piezotubes are also used to scan the sample during conventional STM measurements. Increasing the resonance frequency of the scanner above 10 kHz was essential to ensure good operation. The complete device has not altered the mechanical stability of the microscope; it works in air as well as in ultra‐high vacuum conditions. Its reliability is demonstrated by the possibility of obtaining STM images of adjacent areas.