Understanding the role of energetic particles during the growth of TiO2 thin films by reactive magnetron sputtering through multi-scale Monte Carlo simulations and experimental deposition

Romain Tonneau, Pavel Moskovkin, Jerome Muller, Emile Haye, Stephanos Konstantinidis, Andreas Pflug (Promoteur), Stephane Lucas (Promoteur)

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Physics

Material Science

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Earth and Planetary Sciences

Chemical Engineering

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