TY - JOUR
T1 - Understanding of CO2 interaction with thermally grown SiO2 on Si using IBA depth profiling techniques
AU - Deokar, Geetanjali
AU - D'Angelo, Marie
AU - Briand, Emrick
AU - Deville Cavellin, Catherine
PY - 2013/6/1
Y1 - 2013/6/1
N2 - Interactions between CO2 and SiO2 films thermally grown on Si have been studied using 18O and 13C as isotopic tracers associated with ion beam analysis (IBA) depth profiling techniques. From secondary ion mass spectrometry (SIMS) measurements no carbon from CO2 is detected in the silica while it is found in Si. These results suggest that CO2 diffuses through the silica. Exchanges of oxygen between CO2 and silica can be observed from 18O to 16O SIMS signals variation. The oxygen concentration depth profiles were determined quantitatively using the narrow resonance near 151 keV in the 18O(p,α)15N nuclear reaction (Narrow Resonance Profiling, NRP). We demonstrate that two distinct oxygen exchanges processes co-exist and we determine the diffusion coefficient of the CO2 molecule in the silica at 1100 °C.
AB - Interactions between CO2 and SiO2 films thermally grown on Si have been studied using 18O and 13C as isotopic tracers associated with ion beam analysis (IBA) depth profiling techniques. From secondary ion mass spectrometry (SIMS) measurements no carbon from CO2 is detected in the silica while it is found in Si. These results suggest that CO2 diffuses through the silica. Exchanges of oxygen between CO2 and silica can be observed from 18O to 16O SIMS signals variation. The oxygen concentration depth profiles were determined quantitatively using the narrow resonance near 151 keV in the 18O(p,α)15N nuclear reaction (Narrow Resonance Profiling, NRP). We demonstrate that two distinct oxygen exchanges processes co-exist and we determine the diffusion coefficient of the CO2 molecule in the silica at 1100 °C.
KW - Carbon dioxide
KW - Diffusion
KW - Narrow resonance profiling
KW - Oxygen exchange
KW - Silica
KW - Stable isotopic tracing
UR - http://www.scopus.com/inward/record.url?scp=84896391999&partnerID=8YFLogxK
U2 - 10.1016/j.nimb.2013.04.002
DO - 10.1016/j.nimb.2013.04.002
M3 - Article
SN - 0168-583X
VL - 304
SP - 67
EP - 71
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ER -