Transmission scanning near-field optical microscopy with uncoated silicon tips

Hans U. Danzebrink, Annick Castiaux, Christian Girard, Xavier Bouju, Günter Wilkening

Résultats de recherche: Contribution à un journal/une revueArticleRevue par des pairs

Résumé

In this paper we report on the implementation of an uncoated silicon (Si) cantilever probe into a transmission scanning near-field optical microscopy (SNOM) architecture. In a first stage, the expected transmission behaviour of a sharp silicon probe is investigated by calculating the complete electric field distribution both inside and outside a silicon tip facing a sample. Experimental applications using near-infrared radiation λ = 1.06 μm) are then proposed. In particular, compact disc features (Ax ≤ 1 μm) were imaged successfully with our setup (lateral resolution: better than 250 nm). Furthermore, when dealing with finer sample structures (Δx ≤ 100 nm), topography artifacts were clearly evidenced. The resulting highly resolved images of nanostructures are to be attributed to some interference effects occurring between the illuminated probe and the sample.

langue originaleAnglais
Pages (de - à)371-377
Nombre de pages7
journalUltramicroscopy
Volume71
Numéro de publication1-4
Les DOIs
Etat de la publicationPublié - 1 mars 1998
EvénementProceedings of the 1997 4th International Conference on Near-Field Optics and Related Techniques, NFO-4 - Jerusalem, Israel
Durée: 9 févr. 199713 févr. 1997

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