TY - JOUR
T1 - Transmission scanning near-field optical microscopy with uncoated silicon tips
AU - Danzebrink, Hans U.
AU - Castiaux, Annick
AU - Girard, Christian
AU - Bouju, Xavier
AU - Wilkening, Günter
PY - 1998/3/1
Y1 - 1998/3/1
N2 - In this paper we report on the implementation of an uncoated silicon (Si) cantilever probe into a transmission scanning near-field optical microscopy (SNOM) architecture. In a first stage, the expected transmission behaviour of a sharp silicon probe is investigated by calculating the complete electric field distribution both inside and outside a silicon tip facing a sample. Experimental applications using near-infrared radiation λ = 1.06 μm) are then proposed. In particular, compact disc features (Ax ≤ 1 μm) were imaged successfully with our setup (lateral resolution: better than 250 nm). Furthermore, when dealing with finer sample structures (Δx ≤ 100 nm), topography artifacts were clearly evidenced. The resulting highly resolved images of nanostructures are to be attributed to some interference effects occurring between the illuminated probe and the sample.
AB - In this paper we report on the implementation of an uncoated silicon (Si) cantilever probe into a transmission scanning near-field optical microscopy (SNOM) architecture. In a first stage, the expected transmission behaviour of a sharp silicon probe is investigated by calculating the complete electric field distribution both inside and outside a silicon tip facing a sample. Experimental applications using near-infrared radiation λ = 1.06 μm) are then proposed. In particular, compact disc features (Ax ≤ 1 μm) were imaged successfully with our setup (lateral resolution: better than 250 nm). Furthermore, when dealing with finer sample structures (Δx ≤ 100 nm), topography artifacts were clearly evidenced. The resulting highly resolved images of nanostructures are to be attributed to some interference effects occurring between the illuminated probe and the sample.
KW - Atomic-force microscopy (AFM)
KW - Near-field optical microscopy (NFOM)
KW - Tip- scanning instrumentation design and characterization
UR - http://www.scopus.com/inward/record.url?scp=0032033275&partnerID=8YFLogxK
U2 - 10.1016/S0304-3991(97)00101-0
DO - 10.1016/S0304-3991(97)00101-0
M3 - Article
AN - SCOPUS:0032033275
SN - 0304-3991
VL - 71
SP - 371
EP - 377
JO - Ultramicroscopy
JF - Ultramicroscopy
IS - 1-4
T2 - Proceedings of the 1997 4th International Conference on Near-Field Optics and Related Techniques, NFO-4
Y2 - 9 February 1997 through 13 February 1997
ER -