Transmission electron microscopy study of erbium silicide formation from Ti/Er stack for Schottky contact applications

J. Ratajczak, A. Laszcz, A. Czerwinski, J. Ka̧tcki, F. Phillipp, P.A. Van Aken, N. Reckinger, E. Dubois

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    Résumé

    In this paper, we present results of transmission electron microscopy studies on erbium silicide structures fabricated under various thermal conditions. A titanium cap has been used as a protective layer against oxidation during rapid thermal annealing of an erbium layer in a temperature range of 300-700°C. Both layers (200 nm Ti and 25 nm Er) were deposited by electron-beam sputtering. The investigations have shown that the transformation of the 25-nm-thick erbium into erbium silicide is completed after annealing at 500°C. At higher temperatures, the formation of a titanium silicide layer above erbium silicide is observed. The lowest Schottky barrier has been measured in the sample annealed at 700°C.
    langue originaleAnglais
    Pages (de - à)379-383
    Nombre de pages5
    journalJournal of Microscopy
    Volume237
    Numéro de publication3
    Les DOIs
    Etat de la publicationPublié - 1 mars 2010

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