TY - GEN
T1 - Transmission electron microscopy study of erbium silicide formation from Ti/Er stack for Schottky contact applications
AU - Ratajczak, J.
AU - Laszcz, A.
AU - Czerwinski, A.
AU - Ka̧tcki, J.
AU - Phillipp, F.
AU - Van Aken, P.A.
AU - Reckinger, N.
AU - Dubois, E.
PY - 2010/3/1
Y1 - 2010/3/1
N2 - In this paper, we present results of transmission electron microscopy studies on erbium silicide structures fabricated under various thermal conditions. A titanium cap has been used as a protective layer against oxidation during rapid thermal annealing of an erbium layer in a temperature range of 300-700°C. Both layers (200 nm Ti and 25 nm Er) were deposited by electron-beam sputtering. The investigations have shown that the transformation of the 25-nm-thick erbium into erbium silicide is completed after annealing at 500°C. At higher temperatures, the formation of a titanium silicide layer above erbium silicide is observed. The lowest Schottky barrier has been measured in the sample annealed at 700°C. © 2010 The Royal Microscopical Society.
AB - In this paper, we present results of transmission electron microscopy studies on erbium silicide structures fabricated under various thermal conditions. A titanium cap has been used as a protective layer against oxidation during rapid thermal annealing of an erbium layer in a temperature range of 300-700°C. Both layers (200 nm Ti and 25 nm Er) were deposited by electron-beam sputtering. The investigations have shown that the transformation of the 25-nm-thick erbium into erbium silicide is completed after annealing at 500°C. At higher temperatures, the formation of a titanium silicide layer above erbium silicide is observed. The lowest Schottky barrier has been measured in the sample annealed at 700°C. © 2010 The Royal Microscopical Society.
UR - http://www.scopus.com/inward/record.url?scp=77149148149&partnerID=8YFLogxK
U2 - 10.1111/j.1365-2818.2009.03264.x
DO - 10.1111/j.1365-2818.2009.03264.x
M3 - Conference contribution
VL - 237
SP - 379
EP - 383
BT - Journal of Microscopy
ER -