Theoretical and experimental approaches for the determination of functional properties of MgSnN₂ thin films

INIS

• thin films 100%
• films 100%
• deposition 50%
• substrates 33%
• environment 16%
• silica 16%
• range 16%
• comparative evaluations 16%
• x radiation 16%
• x-ray diffraction 16%
• atoms 16%
• silicon 16%
• photoemission spectroscopy 16%
• electrical properties 16%
• spectrometry 16%
• magnetrons 16%
• sputtering 16%
• oxidation state 16%
• microstructure 16%
• magnesium 16%
• optical properties 16%
• tin 16%
• preferred orientation 16%
• electron mobility 16%
• hall effect 16%

Keyphrases

• MgSnN2 100%
• Reactive Magnetron Co-sputtering 20%
• Fused Silica Substrate 20%

Material Science

• X-Ray Diffractogram 16%