Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

Jonathan Dervaux, Pavel Moskovkin, P-A. Cormier, O. Douhéret, Stephanos Konstantinidis, Roberto Lazzaroni, Stéphane Lucas, Rony Snyders

Résultats de recherche: Contribution à un journal/une revueArticle

Résumé

In this work, glancing angle deposition and magnetron sputtering are combined to synthesize nanostructured Ti films. Different type of microstructures (tilted columns, straight pillars, zigzags) are obtained as a function of the
experimental conditions. As a support, kinetic Monte Carlo simulations are performed to understand the observed trends using the NASCAM (NAnoSCAle Modeling) code. The latter is used to simulate the growth of the
films and to explain the effect on the obtained structures of experimental parameters such as the substrate temperature, the gas pressure as well as the substrate tilting and rotation speed. NASCAM enables quantitative prediction
of the density, the surface roughness, and the columnshape asymmetry. In addition, the effective porosity (ϕe) of the structures was evaluated from the simulation data for two molecules presenting different size (0.64 and 3.20 nm). The results show that ϕe decreases with the size of the adsorbed molecule, from above 50% for the small molecule to below 10% for the larger one. This is understood by considering the accessibility of the pore as a function of the size of the molecules. These data are correlated to experimental results obtained by
transmission electron microscopy.
langueAnglais
Pages646-657
Nombre de pages14
journalThin Solid Films
Volume636
Les DOIs
étatPublié - 2017

Empreinte digitale

Magnetron sputtering
magnetron sputtering
sputtering
Thin films
Molecules
synthesis
thin films
molecules
porosity
data simulation
Substrates
Electron microscopy
gas pressure
electron microscopy
surface roughness
Porosity
Gases
Surface roughness
asymmetry
trends

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    title = "Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study",
    abstract = "In this work, glancing angle deposition and magnetron sputtering are combined to synthesize nanostructured Ti films. Different type of microstructures (tilted columns, straight pillars, zigzags) are obtained as a function of theexperimental conditions. As a support, kinetic Monte Carlo simulations are performed to understand the observed trends using the NASCAM (NAnoSCAle Modeling) code. The latter is used to simulate the growth of thefilms and to explain the effect on the obtained structures of experimental parameters such as the substrate temperature, the gas pressure as well as the substrate tilting and rotation speed. NASCAM enables quantitative predictionof the density, the surface roughness, and the columnshape asymmetry. In addition, the effective porosity (ϕe) of the structures was evaluated from the simulation data for two molecules presenting different size (0.64 and 3.20 nm). The results show that ϕe decreases with the size of the adsorbed molecule, from above 50{\%} for the small molecule to below 10{\%} for the larger one. This is understood by considering the accessibility of the pore as a function of the size of the molecules. These data are correlated to experimental results obtained bytransmission electron microscopy.",
    keywords = "Monte Carlo simulation, Titanium Thin films, Glancing angle deposition, Magnetron sputtering, Nanostructured films, Porosity",
    author = "Jonathan Dervaux and Pavel Moskovkin and P-A. Cormier and O. Douh{\'e}ret and Stephanos Konstantinidis and Roberto Lazzaroni and St{\'e}phane Lucas and Rony Snyders",
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    Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study. / Dervaux, Jonathan; Moskovkin, Pavel; Cormier, P-A.; Douhéret, O.; Konstantinidis, Stephanos; Lazzaroni, Roberto; Lucas, Stéphane; Snyders, Rony.

    Dans: Thin Solid Films, Vol 636, 2017, p. 646-657.

    Résultats de recherche: Contribution à un journal/une revueArticle

    TY - JOUR

    T1 - Synthesis of nanostructured Ti thin films by combining glancing angle deposition and magnetron sputtering: A joint experimental and modeling study

    AU - Dervaux, Jonathan

    AU - Moskovkin, Pavel

    AU - Cormier, P-A.

    AU - Douhéret, O.

    AU - Konstantinidis, Stephanos

    AU - Lazzaroni, Roberto

    AU - Lucas, Stéphane

    AU - Snyders, Rony

    PY - 2017

    Y1 - 2017

    N2 - In this work, glancing angle deposition and magnetron sputtering are combined to synthesize nanostructured Ti films. Different type of microstructures (tilted columns, straight pillars, zigzags) are obtained as a function of theexperimental conditions. As a support, kinetic Monte Carlo simulations are performed to understand the observed trends using the NASCAM (NAnoSCAle Modeling) code. The latter is used to simulate the growth of thefilms and to explain the effect on the obtained structures of experimental parameters such as the substrate temperature, the gas pressure as well as the substrate tilting and rotation speed. NASCAM enables quantitative predictionof the density, the surface roughness, and the columnshape asymmetry. In addition, the effective porosity (ϕe) of the structures was evaluated from the simulation data for two molecules presenting different size (0.64 and 3.20 nm). The results show that ϕe decreases with the size of the adsorbed molecule, from above 50% for the small molecule to below 10% for the larger one. This is understood by considering the accessibility of the pore as a function of the size of the molecules. These data are correlated to experimental results obtained bytransmission electron microscopy.

    AB - In this work, glancing angle deposition and magnetron sputtering are combined to synthesize nanostructured Ti films. Different type of microstructures (tilted columns, straight pillars, zigzags) are obtained as a function of theexperimental conditions. As a support, kinetic Monte Carlo simulations are performed to understand the observed trends using the NASCAM (NAnoSCAle Modeling) code. The latter is used to simulate the growth of thefilms and to explain the effect on the obtained structures of experimental parameters such as the substrate temperature, the gas pressure as well as the substrate tilting and rotation speed. NASCAM enables quantitative predictionof the density, the surface roughness, and the columnshape asymmetry. In addition, the effective porosity (ϕe) of the structures was evaluated from the simulation data for two molecules presenting different size (0.64 and 3.20 nm). The results show that ϕe decreases with the size of the adsorbed molecule, from above 50% for the small molecule to below 10% for the larger one. This is understood by considering the accessibility of the pore as a function of the size of the molecules. These data are correlated to experimental results obtained bytransmission electron microscopy.

    KW - Monte Carlo simulation

    KW - Titanium Thin films

    KW - Glancing angle deposition

    KW - Magnetron sputtering

    KW - Nanostructured films

    KW - Porosity

    U2 - 10.1016/j.tsf.2017.06.006

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    T2 - Thin Solid Films

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    SN - 0040-6090

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