Résumé
The influence of primary ion nature and energy on ISS polar plots is studied experimentally and by simulation for scattering on a Cu(110) surface. The scattering of He and Ne ions in the energy range 1-3 keV is determined by the sampling depth of these ions. Simulations performed with the MARLOWE code show that helium ions analyse a large depth into the crystal while neon ions analyse the very first few atomic layers only.
langue originale | Anglais |
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Pages (de - à) | 409-412 |
Nombre de pages | 4 |
journal | Vacuum |
Volume | 45 |
Numéro de publication | 4 |
Etat de la publication | Publié - 1 avr. 1994 |