Surface characterization of clean ployimide films by high resolution electron energy loss spectroscopy

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langue originale	Français
Pages (de - à)	598-602
Nombre de pages	5
journal	Journal of Vacuum Science and Technology A
Volume	5
Etat de la publication	Publié - 1987

Contient cette citation

@article{d3131063338c414cb4a6ce7e9adae4d3,

title = "Surface characterization of clean ployimide films by high resolution electron energy loss spectroscopy",

author = "Jean-Jacques Pireaux and Chantal Gr{\'e}goire and Paul Thiry and Roland Caudano and T.C. CLARKE",

year = "1987",

language = "Fran{\c c}ais",

volume = "5",

pages = "598--602",

journal = "Journal of Vacuum Science and Technology A",

publisher = "AVS Science and Technology Society",

}

TY - JOUR

T1 - Surface characterization of clean ployimide films by high resolution electron energy loss spectroscopy

AU - Pireaux, Jean-Jacques

AU - Grégoire, Chantal

AU - Thiry, Paul

AU - Caudano, Roland

AU - CLARKE, T.C.

PY - 1987

Y1 - 1987

M3 - Article

VL - 5

SP - 598

EP - 602

JO - Journal of Vacuum Science and Technology A

JF - Journal of Vacuum Science and Technology A

ER -