Sub-10-nm nanogap fabrication by silicidation

Xiaohui Tang, Laurent A. Francis, Constantin Augustin Dutu, Nicolas Reckinger, Jean Pierre Raskin

Résultats de recherche: Contribution dans un livre/un catalogue/un rapport/dans les actes d'une conférenceArticle dans les actes d'une conférence/un colloque

Résumé

We developed a simple and reliable method for the fabrication of sub-10-nm wide nanogaps. The self-formed nanogap is based on the stoichiometric solid-state reaction between metal and Si atoms during silicidation. The nanogap width is determined by the metal layer thickness. Our proposed method provides nanogaps with either symmetric or asymmetric electrodes, as well as multiple nanogaps within one unique process step. Therefore, this method allows for high throughput and large-scale production.

langue originaleAnglais
titreProceedings of the IEEE Conference on Nanotechnology
Pages570-573
Nombre de pages4
Les DOIs
étatPublié - 1 déc. 2013
Evénement2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013 - Beijing, Chine
Durée: 5 août 20138 août 2013

Une conférence

Une conférence2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013
PaysChine
La villeBeijing
période5/08/138/08/13

Empreinte digitale

Metals
Fabrication
fabrication
Solid state reactions
metals
Throughput
solid state
Atoms
Electrodes
electrodes
atoms

Citer ceci

Tang, X., Francis, L. A., Dutu, C. A., Reckinger, N., & Raskin, J. P. (2013). Sub-10-nm nanogap fabrication by silicidation. Dans Proceedings of the IEEE Conference on Nanotechnology (p. 570-573). [6720811] https://doi.org/10.1109/NANO.2013.6720811
Tang, Xiaohui ; Francis, Laurent A. ; Dutu, Constantin Augustin ; Reckinger, Nicolas ; Raskin, Jean Pierre. / Sub-10-nm nanogap fabrication by silicidation. Proceedings of the IEEE Conference on Nanotechnology. 2013. p. 570-573
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Tang, X, Francis, LA, Dutu, CA, Reckinger, N & Raskin, JP 2013, Sub-10-nm nanogap fabrication by silicidation. Dans Proceedings of the IEEE Conference on Nanotechnology., 6720811, p. 570-573, 2013 13th IEEE International Conference on Nanotechnology, IEEE-NANO 2013, Beijing, Chine, 5/08/13. https://doi.org/10.1109/NANO.2013.6720811

Sub-10-nm nanogap fabrication by silicidation. / Tang, Xiaohui; Francis, Laurent A.; Dutu, Constantin Augustin; Reckinger, Nicolas; Raskin, Jean Pierre.

Proceedings of the IEEE Conference on Nanotechnology. 2013. p. 570-573 6720811.

Résultats de recherche: Contribution dans un livre/un catalogue/un rapport/dans les actes d'une conférenceArticle dans les actes d'une conférence/un colloque

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Tang X, Francis LA, Dutu CA, Reckinger N, Raskin JP. Sub-10-nm nanogap fabrication by silicidation. Dans Proceedings of the IEEE Conference on Nanotechnology. 2013. p. 570-573. 6720811 https://doi.org/10.1109/NANO.2013.6720811