Styrene and methyl methacrylate copolymer synthesized by RF inductively coupled plasma

Z. Li, X. Gillon, Marwane Diallo, L. Houssiau, J.-J. Pireaux

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Résumé

A series of random copolymers of styrene and methyl methacrylate was prepared on a silicon substrate by RF pulsed inductively coupled plasma. The plasma gas phase was investigated by optical emission spectroscopy (OES). The physico-chemical characteristics of the deposited copolymer films were analyzed by several surface techniques: X-ray photoelectron spectroscopy (XPS), Fourier-Transform infrared absorption (FT-IR), Time-of-flight secondary ion mass spectrometry (ToF-SIMS), etc. OES of the plasma and FT-IR spectra of the films are predictive: plasma emitting a higher relative benzyl radical signal results in the deposition of a more aromatic plasma polymer. The functional thin films can be deposited by selection of the co-monomers.
langue originaleAnglais
journalJournal of Physics : Conference Series
Volume275
Numéro de publication1
Les DOIs
Etat de la publicationPublié - 1 janv. 2011

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