Study of the formation of a carbon layer on a sputtering target during magnetron-enhanced reactive sputtering

P. VANDEN BRANDE, Stephane Lucas, R. WINAND, R. RENARD, A. WEYMEERSCH

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langue originale	Français
Pages (de - à)	151-157
Nombre de pages	7
journal	Surface and Coatings Technology
Volume	61
Etat de la publication	Publié - 1993

Contient cette citation

@article{bd21295acb904bce85364528972e9c40,

title = "Study of the formation of a carbon layer on a sputtering target during magnetron-enhanced reactive sputtering",

author = "{VANDEN BRANDE}, P. and Stephane Lucas and R. WINAND and R. RENARD and A. WEYMEERSCH",

year = "1993",

language = "Fran{\c c}ais",

volume = "61",

pages = "151--157",

journal = "Surface and Coatings Technology",

publisher = "Elsevier",

}