Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

V. De Vriendt; F. Maseri; A. Nonet; S. Lucas

doi:10.1002/ppap.200930105

Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

V. De Vriendt, F. Maseri, A. Nonet, S. Lucas

Namur Research Institute for Life Sciences

Résultats de recherche: Contribution à un journal/une revue › Article › Revue par des pairs

Résumé

The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

langue originale	Anglais
Pages (de - à)	S6-S10
journal	Plasma Processes and Polymers
Volume	6
Numéro de publication	SUPPL. 1
Les DOIs	https://doi.org/10.1002/ppap.200930105
Etat de la publication	Publié - 1 janv. 2009

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10.1002/ppap.200930105

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Contient cette citation

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title = "Study of nanoparticles formation in a pulsed magnetron discharge in acetylene",

abstract = "The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. {\textcopyright} 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.",

keywords = "pulsed magnetron discharge, nanoparticles, plasma polymerization, acetylene",

author = "{De Vriendt}, V. and F. Maseri and A. Nonet and S. Lucas",

year = "2009",

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doi = "10.1002/ppap.200930105",

language = "English",

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TY - JOUR

T1 - Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

AU - De Vriendt, V.

AU - Maseri, F.

AU - Nonet, A.

AU - Lucas, S.

PY - 2009/1/1

Y1 - 2009/1/1

N2 - The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

AB - The aim of this work is to study in a pulsed magnetron discharge of acetylene at 10 Torr, the influence of t parameter on roughness and morphology of films deposited on silicon substrates. By using a low power discharge (long t and short t for a given power), a coating with unique morphology is deposited. This film is formed of nanoparticles and particular agglomerates called 'flowers' of micrometric size. To the best of our knowledge, it's the first time that such 'flowers' structures have been observed for a pulsed plasma polymerization of acetylene. According to the obtained results in mass spectrometry of plasma, nanoparticles and 'flowers' are probably formed in gas phase. A growth mechanism in several steps is proposed. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

KW - pulsed magnetron discharge

KW - nanoparticles

KW - plasma polymerization

KW - acetylene

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IS - SUPPL. 1

ER -

Study of nanoparticles formation in a pulsed magnetron discharge in acetylene

Résumé

Accès au document

Autres fichiers et liens

Empreinte digitale

Équipement

Microscopie électronique

Synthèse, Irradiation et Analyse de Matériaux (SIAM) (2016 - ...)

Contient cette citation